The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 20, 2010

Filed:

Apr. 09, 2007
Applicants:

Douglas D. Coolbaugh, Essex Junction, VT (US);

Stephen S. Furkay, South Burlington, VT (US);

Jeffrey B. Johnson, Essex Junction, VT (US);

Robert M. Rassel, Colchester, VT (US);

David C. Sheridan, Williston, VT (US);

Inventors:

Douglas D. Coolbaugh, Essex Junction, VT (US);

Stephen S. Furkay, South Burlington, VT (US);

Jeffrey B. Johnson, Essex Junction, VT (US);

Robert M. Rassel, Colchester, VT (US);

David C. Sheridan, Williston, VT (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/8234 (2006.01); H01L 21/425 (2006.01);
U.S. Cl.
CPC ...
Abstract

Method of fabricating a varactor that includes providing a semiconductor substrate, doping a lower region of the semiconductor substrate with a first dopant at a first energy level, doping a middle region of the semiconductor substrate with a second dopant at a second energy level lower than the first energy level, and doping an upper region of the semiconductor substrate with a third dopant at a third energy level lower than the second energy level.


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