The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
Jan. 25, 2006
Hiroshi Makino, Kokubunji, JP;
Zhaohui Cheng, Tokyo, JP;
Kenji Tanimoto, Hitachinaka, JP;
Hideo Todokoro, Hinode, JP;
Hiroshi Makino, Kokubunji, JP;
Zhaohui Cheng, Tokyo, JP;
Kenji Tanimoto, Hitachinaka, JP;
Hideo Todokoro, Hinode, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
The invention solves charge nonuniformity of a specimen surface resulting from emission variation of a carbon nanotube electron source and individual difference of emission characteristics. During charge control processing, charge of the specimen surface is measured in real time. As means for solving charge nonuniformity resulting from nonuniformity of electron illumination density, electrons illuminating the specimen and the specimen are moved relatively to average electron illumination density. Moreover, an absorption current flowing into the specimen and the numbers of secondary electrons emitted from the specimen and of backscattered electrons are measured as means for monitoring charge of the specimen surface in real time.