The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2010
Filed:
May. 08, 2008
Duane E. Allen, Milton, VT (US);
Brian K. Burnor, Fairfax, VT (US);
Thomas A. Dotolo, Hinesburg, VT (US);
Leonard J. Gardecki, Essex, VT (US);
William L. Hammond, Colchester, VT (US);
Kibby B. Horsford, Essex, VT (US);
Charles R. Ramsey, Essex Junction, VT (US);
Duane E. Allen, Milton, VT (US);
Brian K. Burnor, Fairfax, VT (US);
Thomas A. Dotolo, Hinesburg, VT (US);
Leonard J. Gardecki, Essex, VT (US);
William L. Hammond, Colchester, VT (US);
Kibby B. Horsford, Essex, VT (US);
Charles R. Ramsey, Essex Junction, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A system for of aligning a mask to a substrate comprising: a fixture for holding the mask and the substrate in fixed positions relative to each other; means for holding the substrate, the means for holding the substrate protruding through openings in a table and the fixture, the means for holding fixedly mounted on a stage, the stage moveable in first and second directions and rotatable about an axis relative to the table; means for affixing the fixture containing the mask and the substrate to the table; means for controlling the means for temporarily affixing so as to generate a uniform force around a perimeter of the fixture to effectuate the temporarily affixing; means for aligning the mask to the substrate, the means for aligning controlling movement of the stage in the first and second directions and rotation about the axis; and means for fastening the fixture together.