The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
Sep. 17, 2008
Klaus Beck, Oberkochen, DE;
Bernhard Gellrich, Aalen, DE;
Hubert Holderer, Oberkochen, DE;
Thomas Petasch, Aalen, DE;
Cornelia Roesch, Essingen, DE;
Alexander Kohl, Aalen, DE;
Klaus Beck, Oberkochen, DE;
Bernhard Gellrich, Aalen, DE;
Hubert Holderer, Oberkochen, DE;
Thomas Petasch, Aalen, DE;
Cornelia Roesch, Essingen, DE;
Alexander Kohl, Aalen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A arrangement serves for the adjustment of an optical element (), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element () is mounted in a mount () by means of a number of bearing feet () distributed over the circumference of the optical element () and is selectively deformable by actuators (). At least some of the bearing feet () are engaged by the actuators () in a region of the respective bearing foot () in such a way that the respective bearing foot () can be displaced in the direction of the optical axis ().