The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
Feb. 09, 2007
Ibrahim Abdulhalim, Kfar Manda, IL;
Mike Adel, Zichron Ya'akov, IL;
Michael Friedmann, Nesher, IL;
Michael Faeyrman, Kiryat Motzkin, IL;
Ibrahim Abdulhalim, Kfar Manda, IL;
Mike Adel, Zichron Ya'akov, IL;
Michael Friedmann, Nesher, IL;
Michael Faeyrman, Kiryat Motzkin, IL;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.