The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
Mar. 30, 2007
Arie Jeffrey Den Boef, Waalre, NL;
Karel Diederick Van Der Mast, Helmond, NL;
Maurits Van Der Schaar, Eindhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Karel Diederick Van Der Mast, Helmond, NL;
Maurits Van Der Schaar, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
In a method of measuring asymmetry in a scatterometer, a target portion is illuminated twice, first with 0° of substrate rotation and secondly with 180° of substrate rotation. One of those images is rotated and then that rotated image is subtracted from the other image. In this way, asymmetry of the scatterometer can be corrected.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile