The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
Dec. 20, 2007
Kyung Hee Hyung, Sungnam-si, KR;
Jong Seob Kim, Daejeon Kwangyeok-si, KR;
Dong Seon Uh, Seoul, KR;
Chang IL OH, Seongnam-si, KR;
Kyong Ho Yoon, Daejeon Kwangyeok-si, KR;
Min Soo Kim, Incheon Kwangyeok-si, KR;
Jin Kuk Lee, Gunpo-si, KR;
Kyung Hee Hyung, Sungnam-si, KR;
Jong Seob Kim, Daejeon Kwangyeok-si, KR;
Dong Seon Uh, Seoul, KR;
Chang Il Oh, Seongnam-si, KR;
Kyong Ho Yoon, Daejeon Kwangyeok-si, KR;
Min Soo Kim, Incheon Kwangyeok-si, KR;
Jin Kuk Lee, Gunpo-si, KR;
Cheil Industries, Inc., Gumi-si, Gyeongsangbuk-do, KR;
Abstract
An antireflective hardmask composition includes an organic solvent, and at least one polymer represented by Formulae A, B or C: In Formulae A and B, the fluorene group is unsubstituted or substituted, in Formula C, the naphthalene group is unsubstituted or substituted, n is at least 1 and is less than about 750, m is at least 1, and m+n is less than about 750, G is an aromatic ring-containing group having an alkoxy group, and Ris methylene or includes a non-fluorene-containing aryl linking group.