The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2010
Filed:
Jul. 17, 2007
Soichi Isobe, Kanagawa, JP;
Hideo Aizawa, Kanagawa, JP;
Hiroomi Torii, Kanagawa, JP;
Daisuke Koga, Kanagawa, JP;
Satoshi Wakabayashi, Kanagawa, JP;
Soichi Isobe, Kanagawa, JP;
Hideo Aizawa, Kanagawa, JP;
Hiroomi Torii, Kanagawa, JP;
Daisuke Koga, Kanagawa, JP;
Satoshi Wakabayashi, Kanagawa, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A substrate delivery mechanism comprises a top ring, a substrate loader for loading a substrate, and a pusher mechanism, wherein the substrate loader comprises a top ring guide and the pusher mechanism comprises a top ring guide lifting table, in which the top ring guide and the top ring guide lifting table together form a sealed space below the substrate held by the top ring in a condition where the substrate loader is moved up by the pusher mechanism, wherein the substrate is detached from the top ring by exhausting the sealed space while at the same time injecting a fluid from through-holes provided in a substrate holding surface of the top ring.