The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
Nov. 17, 2006
Sang-il Park, Seongnam, KR;
Yong-seok Kim, Seoul, KR;
Jitae Kim, Anyang, KR;
Sang Han Chung, Seoul, KR;
Hyun-seung Shin, Incheon, KR;
Jung-rok Lee, Yongin, KR;
Euichul Hwang, Seongnam, KR;
Sang-il Park, Seongnam, KR;
Yong-Seok Kim, Seoul, KR;
Jitae Kim, Anyang, KR;
Sang Han Chung, Seoul, KR;
Hyun-Seung Shin, Incheon, KR;
Jung-Rok Lee, Yongin, KR;
Euichul Hwang, Seongnam, KR;
Park Systems Corp., Seoul, KR;
Abstract
Provided is a scanning probe microscope capable of precisely analyzing characteristics of samples having an overhang surface structure. The scanning probe microscope comprises a first probe, a first scanner changing a position of the first probe along a straight line, and a second scanner changing a position of a sample in a plane, wherein the straight line in which the position of the first probe is changed by using the first scanner is non-perpendicular to the plane in which the position of the sample is changed by using the second scanner.