The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2009
Filed:
Jul. 26, 2006
Yuichi Tachikawa, Shizuoka, JP;
Kazumichi Yasui, Shizuoka, JP;
Kiyoshi Nakaso, Shizuoka, JP;
Kiyoshi Hattori, Tokyo, JP;
Tsugiyuki Okuya, Hiroshima, JP;
Makoto Mita, Shizuoka, JP;
Yuichi Tachikawa, Shizuoka, JP;
Kazumichi Yasui, Shizuoka, JP;
Kiyoshi Nakaso, Shizuoka, JP;
Kiyoshi Hattori, Tokyo, JP;
Tsugiyuki Okuya, Hiroshima, JP;
Makoto Mita, Shizuoka, JP;
NuFlare Technology, Inc., Numazu-shi, JP;
Abstract
A position measurement apparatus includes a movable stage structure, a measurement unit using a laser to measure a moved position of the stage and to output a corresponding measured value, a first filter configured to attenuate a first component of a certain frequency region of the measured value outputted by the measurement unit, a second filter connected in parallel with the first filter configured to attenuate a second component other than the certain frequency region of the measured value outputted by the measurement unit, a third filter connected in series to the second filter with the series connection of the second and third filters connected in parallel with the first filter, configured to attenuate the first component of the certain frequency region of the measured value outputted by the measurement unit, and a processing unit configured to combine an output of the first filter and an output of the series connection of the second and third filters and to thereby output a first combined value.