The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2009
Filed:
Oct. 18, 2005
Joost Jeroen Ottens, Veldhoven, NL;
Aschwin Lodewijk Hendricus Johannes Van Meer, Roosendaal, NL;
Wim Tjibbo Tel, Helmond, NL;
Jacob Willem Vink, Eindhoven, NL;
Rene Theodorus Petrus Compen, Valkenswaard, NL;
Petrus Johannes Gerrits, Mierlo, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Aschwin Lodewijk Hendricus Johannes Van Meer, Roosendaal, NL;
Wim Tjibbo Tel, Helmond, NL;
Jacob Willem Vink, Eindhoven, NL;
Rene Theodorus Petrus Compen, Valkenswaard, NL;
Petrus Johannes Gerrits, Mierlo, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The invention provides a height detecting apparatus for a lithographic apparatus. The height mapping apparatus includes a height mapping unit for providing at least one height map of a top surface of an object to be placed in a radiation beam of the lithographic apparatus, the object to be clamped by a clamping force applied thereto on a support constructed to support the object. The height mapping apparatus also includes a control unit for controlling the mapping unit to provide the at least one height map of the object relative to at least two different clamping pressure levels.