The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2009
Filed:
Mar. 21, 2006
Applicants:
Renatus Gerardus Klaver, Eindhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Inventors:
Renatus Gerardus Klaver, Eindhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A displacement measurement system configured to provide measurement of the relative displacement of two components in six degrees of freedom with improved consistency and without requiring excessive space.