The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2009
Filed:
Oct. 10, 2007
Takatoshi Yamashita, Kyoto, JP;
Tadashi Ikejiri, Kyoto, JP;
Kohei Tanaka, Kyoto, JP;
Weijiang Zhao, Kyoto, JP;
Hideyuki Tanaka, Miyagi, JP;
Takatoshi Yamashita, Kyoto, JP;
Tadashi Ikejiri, Kyoto, JP;
Kohei Tanaka, Kyoto, JP;
Weijiang Zhao, Kyoto, JP;
Hideyuki Tanaka, Miyagi, JP;
Nissin Ion Equipment Co., Ltd., Kyoto, JP;
Abstract
An analyzing electromagnet constituting an ion implanter has a first inner coil, a second inner coil, three first outer coils, three second outer coils, and a yoke. The inner coils are saddle-shaped coils cooperating with each other to generate a main magnetic field which bends an ion beam in the X direction. Each of the outer coils is a saddle-shaped coil which generates a sub-magnetic field correcting the main magnetic field. Each of the coils has a configuration where a notched portion is disposed in a fan-shaped cylindrical stacked coil configured by: winding a laminations of an insulation sheet and a conductor sheet in multiple turn on an outer peripheral face of a laminated insulator; and forming a laminated insulator on an outer peripheral face.