The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2009
Filed:
Feb. 15, 2008
Applicants:
Mehran Nasser-ghodsi, Halmilton, MA (US);
Ming Lun Yu, Fremont, CA (US);
Stuart Friedman, Palo Alto, CA (US);
Gabor Toth, San Jose, CA (US);
Inventors:
Mehran Nasser-Ghodsi, Halmilton, MA (US);
Ming Lun Yu, Fremont, CA (US);
Stuart Friedman, Palo Alto, CA (US);
Gabor Toth, San Jose, CA (US);
Assignee:
KLA-Tencor Corporation, San Jose, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/08 (2006.01); G01N 23/227 (2006.01); G01N 23/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and the instrument for characterization of the defects on a surface with Auger electron spectroscopy in a high vacuum environment are disclosed. Defects on the surface of a sample may be characterized with Auger electron spectroscopy in a high vacuum environment.