The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2009
Filed:
Dec. 28, 2005
Budiman Sutedja, Venlo, NL;
Rudy Jan Maria Pellens, Overpelt, BE;
Johannes Paulus Adrianus Maria Van Den Heuvel, Heeze, NL;
Paulus Wilhelmus Leonardus Van Dijk, Eindhoven, NL;
Budiman Sutedja, Venlo, NL;
Rudy Jan Maria Pellens, Overpelt, BE;
Johannes Paulus Adrianus Maria Van Den Heuvel, Heeze, NL;
Paulus Wilhelmus Leonardus Van Dijk, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
According to an aspect of the present invention, there is provided a lithographic apparatus that includes a substrate carrier arranged to hold a substrate in position using an electrostatic force. The substrate carrier is provided with an integral power source. The apparatus also includes a substrate table for holding the substrate carrier.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile