The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Dec. 21, 2007
Richard Johannes Franciscus Van Haren, Veldhoven, NL;
Paul Christiaan Hinnen, Veldhoven, NL;
Sanjay Lalbahadoersing, Helmond, NL;
Henry Megens, Eindhoven, NL;
Maurits Van Der Schaar, Veldhoven, NL;
Richard Johannes Franciscus Van Haren, Veldhoven, NL;
Paul Christiaan Hinnen, Veldhoven, NL;
Sanjay Lalbahadoersing, Helmond, NL;
Henry Megens, Eindhoven, NL;
Maurits Van Der Schaar, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A marker structure on a substrate for optical alignment of the substrate includes a plurality of first structural elements and a plurality of second structural elements. In use, the marker structure allows the optical alignment based upon providing at least one light beam directed on the marker structure, detecting light received from the marker structure at a sensor, and determining alignment information from the detected light, the alignment information comprising information relating a position of the substrate to the sensor.