The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Aug. 21, 2007
Masato Iyoki, Chiba, JP;
Masatsugu Shigeno, Chiba, JP;
Masato Iyoki, Chiba, JP;
Masatsugu Shigeno, Chiba, JP;
SII Nano Technology Inc., Chiba, JP;
Abstract
An inching mechanism for a scanning probe microscope capable of performing measurement with high precision while enhancing the scanning speed by a probe furthermore, and a scanning probe microscope comprising it. The inching mechanism for a scanning probe microscope which is provided in a scanning probe microscope (SPM) () having a stage () for mounting a sample S, and a probe () approaching closely to or touching the surface of the sample S, characterized in that the inching mechanism comprises a first drive section and a second drive section provided independently, a probe inching mechanism () having the first drive section and inching, by the first drive section, the probe () in the X direction and Y direction parallel with the surface of the sample S and intersecting each other, and a stage inching mechanism () having the second drive section and inching, by the second drive section, the stage () in the Z direction perpendicular to the surface of the sample S.