The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2009
Filed:
May. 22, 2008
Alexander Jozef Gubbens, Redwood City, CA (US);
Niles Kenneth Macdonald, San Jose, CA (US);
Mehran Nasser-ghodsi, Hamilton, MA (US);
Rudy Flores Garcia, Union City, CA (US);
Doug Keith Masnaghetti, San Jose, CA (US);
Alexander Jozef Gubbens, Redwood City, CA (US);
Niles Kenneth MacDonald, San Jose, CA (US);
Mehran Nasser-Ghodsi, Hamilton, MA (US);
Rudy Flores Garcia, Union City, CA (US);
Doug Keith Masnaghetti, San Jose, CA (US);
KLA-Technologies Corporation, Milpitas, CA (US);
Abstract
A voltage-isolating passageway for providing high voltage isolation between a component maintained at high DC voltage and a component maintained at a substantially lower voltage is described. The voltage-isolating passageway incorporates a transverse magnetic field across its passageway, which reduces the potential energy of charged particles (e.g., electrons) passing through the passageway. The voltage-isolating passageway includes a passageway and at least two magnets. The passageway has two openings and the two magnets are positioned along opposite and exterior surfaces of the passageway wherein the first and second magnets impose a magnetic field in a transverse direction with respect to a lengthwise axis of the passageway. In one embodiment, each of the passageways have small diameters and transfer gases at small flow rates. A support structure secures the passageways and magnets in position relative to each other and a magnetic shield encases the components to prevent the magnetic field from affecting external components.