The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2009
Filed:
Mar. 20, 2007
Applicants:
Guoheng Zhao, Milpitas, CA (US);
Alexander Belyaev, Mountain View, CA (US);
Christian H. Wolters, Campbell, CA (US);
Paul Andrew Doyle, San Jose, CA (US);
Howard W. Dando, Rio Del Mar, CA (US);
Mehdi Vaez-iravani, Los Gatos, CA (US);
Inventors:
Guoheng Zhao, Milpitas, CA (US);
Alexander Belyaev, Mountain View, CA (US);
Christian H. Wolters, Campbell, CA (US);
Paul Andrew Doyle, San Jose, CA (US);
Howard W. Dando, Rio Del Mar, CA (US);
Mehdi Vaez-Iravani, Los Gatos, CA (US);
Assignee:
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B25B 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.