The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2009
Filed:
Aug. 22, 2008
Jochen Hetzler, Aalen, DE;
Ralf Arnold, Aalen, DE;
Frank Schillke, Aalen, DE;
Bernd Doerband, Aalen, DE;
Jochen Hetzler, Aalen, DE;
Ralf Arnold, Aalen, DE;
Frank Schillke, Aalen, DE;
Bernd Doerband, Aalen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A method of positioning optical elements relative to each other uses an interferometer apparatus comprising a plurality of holograms generating beams of adjustment measuring light which are incident on optical surfaces of the optical elements. Interference patterns generated by superimposing adjustment measuring light of the beams reflected from the surfaces are indicative of positioning errors of the optical elements. The beams of adjustment measuring light may comprise focused beams forming a point focus on the optical surface and beams of light which is orthogonally incident on extended portions on the optical surface.