The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2009
Filed:
Jan. 16, 2007
Applicants:
Kenneth J. Krzeczowski, Scotts Valley, CA (US);
Mehran Nasser-ghodsi, Hamilton, MA (US);
Mathew H. Lent, Livermore, CA (US);
Inventors:
Kenneth J. Krzeczowski, Scotts Valley, CA (US);
Mehran Nasser-Ghodsi, Hamilton, MA (US);
Mathew H. Lent, Livermore, CA (US);
Assignee:
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); G01N 23/225 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for improving throughput in review of images from a charged particle beam microscopy tool and a charged particle beam microscopy tool are disclosed.