The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2009
Filed:
Oct. 24, 2008
Hans-juergen Mann, Oberkochen, DE;
Wolfgang Singer, Aalen, DE;
Joerg Schultz, Aalen, DE;
Johannes Wangler, Koenigsbronn, DE;
Karl-heinz Schuster, Koenigsbronn, DE;
Udo Dinger, Oberkochen, DE;
Martin Antoni, Aalen, DE;
Wilhelm Ulrich, Aalen, DE;
Hans-Juergen Mann, Oberkochen, DE;
Wolfgang Singer, Aalen, DE;
Joerg Schultz, Aalen, DE;
Johannes Wangler, Koenigsbronn, DE;
Karl-Heinz Schuster, Koenigsbronn, DE;
Udo Dinger, Oberkochen, DE;
Martin Antoni, Aalen, DE;
Wilhelm Ulrich, Aalen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
There is provided a projection objective for a projection exposure apparatus that has a primary light source for emitting electromagnetic radiation having a chief ray with a wavelength ≦193 nm. The projection objective includes an object plane, a first mirror, a second mirror, a third mirror, a fourth mirror; and an image plane. The object plane, the first mirror, the second mirror, the third mirror, the fourth mirror and the image plane are arranged in a centered arrangement around a common optical axis. The first mirror, the second mirror, the third mirror, and the fourth mirror are situated between the object plane and the image plane. The chief ray, when incident on an object situated in the object plane, in a direction from the primary light source, is inclined away from the common optical axis.