The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2009
Filed:
May. 16, 2006
Ling Chen, Sunnyvale, CA (US);
Vincent W. Ku, San Jose, CA (US);
Hua Chung, San Jose, CA (US);
Christophe Marcadal, Sunnyvale, CA (US);
Seshadri Ganguli, Sunnyvale, CA (US);
Jenny Lin, Saratoga, CA (US);
Dien-yeh Wu, San Jose, CA (US);
Alan Ouye, San Mateo, CA (US);
Mei Chang, Saratoga, CA (US);
Ling Chen, Sunnyvale, CA (US);
Vincent W. Ku, San Jose, CA (US);
Hua Chung, San Jose, CA (US);
Christophe Marcadal, Sunnyvale, CA (US);
Seshadri Ganguli, Sunnyvale, CA (US);
Jenny Lin, Saratoga, CA (US);
Dien-Yeh Wu, San Jose, CA (US);
Alan Ouye, San Mateo, CA (US);
Mei Chang, Saratoga, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of an apparatus for generating a chemical precursor used in a vapor deposition processing system are provide which include a canister having a sidewall, a top, and a bottom forming an interior volume which is in fluid communication with an inlet port and an outlet port. The canister contains a plurality of baffles that extend from the bottom to an upper portion of the interior volume and form an extended mean flow path between the inlet port and the outlet port. In one embodiment, the baffles are contained on a prefabricated insert positioned on the bottom of the canister. In one example, an inlet tube may extend from the inlet port into the interior region and be positioned substantially parallel to the baffles. An outlet end of the inlet tube may be adapted to direct a gas flow away from the outlet port, such as towards the sidewall or top of the canister.