The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2009
Filed:
Dec. 22, 2004
Adrian John Murrell, Horsham, GB;
Richard David Goldberg, Hove, GB;
Christopher J. S. Burgess, Hove, GB;
David George Armour, Turton, GB;
Erik J. H. Collart, Ashington, GB;
Adrian John Murrell, Horsham, GB;
Richard David Goldberg, Hove, GB;
Christopher J. S. Burgess, Hove, GB;
David George Armour, Turton, GB;
Erik J. H. Collart, Ashington, GB;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The invention relates to improving the efficiency of ion flow from an ion source, by reducing heat loss from the source both in the ion chamber of the ion source and its constituent parts (e.g. the electron source). This is achieved by lining the interior of the ion chamber and/or the exterior with heat reflective and/or heat insulating material and by formation of an indirectly heated cathode tube such that heat transfer along the tube and away from the ion chamber is restricted by the formation of slits in the tube. Efficiency of the ion source is further enhanced by impregnating and/or coating the front plate of the ion chamber with a material which comprises an element or compound thereof, the ions of which element are the same specie as those to be implanted into the substrate from the source thereof.