The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2009
Filed:
Jul. 30, 2007
Yoshikazu Nagamura, Hyogo, JP;
Kouji Tange, Hyogo, JP;
Kouki Hayashi, Tokyo, JP;
Hidehiro Ikeda, Tokyo, JP;
Yoshikazu Nagamura, Hyogo, JP;
Kouji Tange, Hyogo, JP;
Kouki Hayashi, Tokyo, JP;
Hidehiro Ikeda, Tokyo, JP;
Renesas Technology Corp., Tokyo, JP;
Abstract
A shading area having a transmissivity in the range of 0 to 2% is formed at the center of a clear defect in a wiring pattern of a half tone mask. Semitransparent areas having a transmissivity in the range of 10 to 25% are formed, adjacently to shading area, in areas extending from the inside of the edge of an imaginary pattern having no defect to the outside of the edge. In this way, in the correction of the defect in the half tone mask, the working accuracy tolerable margin of the correction portion of the defect can be made large.