The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2009
Filed:
Jul. 12, 2005
Andrew David Johnson, Doylestown, PA (US);
Hoshang Subawalla, Spring, TX (US);
Bing Ji, Allentown, PA (US);
Raymond Nicholas Vrtis, Orefield, PA (US);
Eugene Joseph Karwacki, Jr., Orefield, PA (US);
Robert Gordon Ridgeway, Quakertown, PA (US);
Peter James Maroulis, Alburtis, PA (US);
Mark Leonard O'neill, Allentown, PA (US);
Aaron Scott Lukas, Washington, DC (US);
Stephen Andrew Motika, Kutztown, PA (US);
Andrew David Johnson, Doylestown, PA (US);
Hoshang Subawalla, Spring, TX (US);
Bing Ji, Allentown, PA (US);
Raymond Nicholas Vrtis, Orefield, PA (US);
Eugene Joseph Karwacki, Jr., Orefield, PA (US);
Robert Gordon Ridgeway, Quakertown, PA (US);
Peter James Maroulis, Alburtis, PA (US);
Mark Leonard O'Neill, Allentown, PA (US);
Aaron Scott Lukas, Washington, DC (US);
Stephen Andrew Motika, Kutztown, PA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
A process for removing carbon-containing residues from a substrate is described herein. In one aspect, there is provided a process for removing carbon-containing residue from at least a portion of a surface of a substrate comprising: providing a process gas comprising an oxygen source, a fluorine source, an and optionally additive gas wherein the molar ratio of oxygen to fluorine contained within the process gas ranges from about 1 to about 10; activating the process gas using at least one energy source to provide reactive species; and contacting the surface of the substrate with the reactive species to volatilize and remove the carbon-containing residue from the surface.