The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2009
Filed:
Jun. 19, 2007
Axel Schmidt, Stolpchen, DE;
Frank Fehrmann, Priestewitz, DE;
Ulf Hackius, Dresden, DE;
Stojan Kanev, Sacka, DE;
Steffen Laube, Senftenberg, DE;
Jorg Kiesewetter, Thiendorf, DE;
Axel Schmidt, Stolpchen, DE;
Frank Fehrmann, Priestewitz, DE;
Ulf Hackius, Dresden, DE;
Stojan Kanev, Sacka, DE;
Steffen Laube, Senftenberg, DE;
Jorg Kiesewetter, Thiendorf, DE;
SUSS Micro Tec Test Systems GmbH, Sacka, DE;
Abstract
A method is disclosed for measurement of wafers and other semiconductor components in a probe station, which serves for examination and testing of electronic components. The device under test is held by a chuck and at least one electric probe by a probe support and the device under test and the probe are selectively positioned relative to each other by a positioning device with electric drives and the device under test is contacted. The drive of the positioning device remains in a state of readiness until establishment of contact and is switched off after establishment of contact and before measurement of the device under test.