The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2009
Filed:
May. 10, 2005
David Wang, Sunnyvale, CA (US);
Patrick Huet, San Jose, CA (US);
Tong Huang, Sunnyvale, CA (US);
Martin Plihal, Pleasanton, CA (US);
Adam Chien-huei Chen, San Jose, CA (US);
Mike Van Riet, Morgan Hill, CA (US);
Stewart Hill, San Jose, CA (US);
David Wang, Sunnyvale, CA (US);
Patrick Huet, San Jose, CA (US);
Tong Huang, Sunnyvale, CA (US);
Martin Plihal, Pleasanton, CA (US);
Adam Chien-Huei Chen, San Jose, CA (US);
Mike Van Riet, Morgan Hill, CA (US);
Stewart Hill, San Jose, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
Methods and systems for generating an inspection process for an inspection system are provided. One computer implemented method includes generating inspection data for a selected defect on a specimen at different values of one or more image acquisition parameters of the inspection system. The method also includes determining which of the different values produces the best inspection data for the selected defect. In addition, the method includes selecting the different values determined to produce the best inspection data as values of the one or more image acquisition parameters to be used for the inspection process.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile