The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2009
Filed:
Apr. 29, 2004
Robert Bristol, Portland, OR (US);
Bryan J. Rice, Hillsboro, OR (US);
Ming Fang, Portland, OR (US);
John P. Barnak, Beaverton, OR (US);
Melissa Shell, Portland, OR (US);
Robert Bristol, Portland, OR (US);
Bryan J. Rice, Hillsboro, OR (US);
Ming Fang, Portland, OR (US);
John P. Barnak, Beaverton, OR (US);
Melissa Shell, Portland, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
Passivation coatings and gettering agents may be used in an Extreme Ultraviolet (EUV) source which uses tin (Sn) vapor as a plasma 'fuel' to prevent contamination and corresponding loss of reflectivity due to tin contamination. The passivation coating may be a material to which tin does not adhere, and may be placed on reflective surfaces in the source chamber. The gettering agent may be a material that reacts strongly with tin, and may be placed outside of the collector mirrors and/or on non-reflective surfaces. A passivation coating may also be provided on the insulator between the anode and cathode of the source electrodes to prevent shorting due to tin coating the insulator surface.