The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2009
Filed:
Sep. 29, 2006
Cheng-qun Gui, Best, NL;
Keith Frank Best, Best, NL;
Enno Van Den Brink, Eindhoven, NL;
Budiman Sutedja, Venlo, NL;
Peter Ten Berge, Eindhoven, NL;
Cheng-Qun Gui, Best, NL;
Keith Frank Best, Best, NL;
Enno Van Den Brink, Eindhoven, NL;
Budiman Sutedja, Venlo, NL;
Peter Ten Berge, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A device manufacturing method is disclosed that includes providing a substrate on a substrate table, the substrate having a target region comprising a plurality of generally planar surfaces, each surface having a different height relative to the substrate table, determining the relative heights of each generally planar surface, projecting a patterned beam of radiation onto the target region of the substrate such that the focal plane of the beam substantially coincides with the plane of one of the generally planar surfaces, moving the substrate table in a direction substantially parallel to the axis of the beam, and projecting the patterned beam of radiation onto the target region of the substrate such that the focal plane of the beam substantially coincides with the plane of another of the generally planar surfaces.