The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7554094 B1

Date of Patent:

Jun. 30, 2009

Filed:

Jun. 13, 2007

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

Applicants:

Rainer Knippelmeyer, Aalen, DE;

Oliver Kienzle, Jena, DE;

Thomas Kemen, Aalen, DE;

Heiko Mueller, Heidelberg, DE;

Stephan Uhlemann, Heidelberg, DE;

Maximilian Haider, Gaiberg, DE;

Antonio Casares, Aalen, DE;

Inventors:

Rainer Knippelmeyer, Aalen, DE;

Oliver Kienzle, Jena, DE;

Thomas Kemen, Aalen, DE;

Heiko Mueller, Heidelberg, DE;

Stephan Uhlemann, Heidelberg, DE;

Maximilian Haider, Gaiberg, DE;

Antonio Casares, Aalen, DE;

Assignees:

Carl Zeiss SMT A.G., Oberkochen, DE;

Applied Materials Israel, Rehovot, IL;

Attorney:

Primary Examiner:

Bernard E Souw

Int. Cl.

CPC ...

H01J 1/50 (2006.01); H01J 37/28 (2006.01); H01J 37/244 (2006.01); G21K 5/10 (2006.01); G21K 7/00 (2006.01);

U.S. Cl.

CPC ...

Abstract

An electron-optical arrangement provides a primary beam path for a beam of primary electrons and a secondary beam path for secondary electrons. The electron-optical arrangement includes a magnet arrangement having first, second and third magnetic field regions. The first magnetic field region is traversed by the primary beam path and the secondary beam path. The second magnetic field region is arranged in the primary beam path upstream of the first magnetic field region and is not traversed by the secondary beam path. The first and second magnetic field regions deflect the primary beam path in substantially opposite directions. The third magnetic field region is arranged in the secondary beam path downstream of the first magnetic field region and is not traversed by the first beam path. The first and third magnetic field regions deflect the secondary beam path in a substantially same direction.

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