The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2009
Filed:
Nov. 24, 2003
Bob Streefkerk, Tilburg, NL;
Johannes Jacobus Matheus Baselmans, Oirschot, NL;
Paul Graupner, Aalen, DE;
Jan Haisma, Valkenswaard, NL;
Nicodemus Hattu, Eindhoven, NL;
Christiaan Alexander Hoogendam, Veldhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Johannes Catharinus Hubertus Mulkens, Maastricht, NL;
Bernard Gellrich, Aalen, DE;
Bob Streefkerk, Tilburg, NL;
Johannes Jacobus Matheus Baselmans, Oirschot, NL;
Paul Graupner, Aalen, DE;
Jan Haisma, Valkenswaard, NL;
Nicodemus Hattu, Eindhoven, NL;
Christiaan Alexander Hoogendam, Veldhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Johannes Catharinus Hubertus Mulkens, Maastricht, NL;
Bernard Gellrich, Aalen, DE;
ASML Netherlands B.V., Veldhoven, NL;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
The joint between the projection system element and its support comprises an inorganic layer or a direct bond and is thus liquid tight, which can prevent deformation by an immersion liquid. The joint can be made either warm or cold. Solders, glue, and glue protection can all be used in the formation of this joint. In an embodiment, the elements and its support are made of quartz.