The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2009
Filed:
May. 31, 2005
Applicants:
Gökhan Perçin, Los Gatos, CA (US);
Ram Ramanujam, Santa Cruz, CA (US);
Franz Xaver Zach, Los Gatos, CA (US);
Inventors:
Gökhan Perçin, Los Gatos, CA (US);
Ram Ramanujam, Santa Cruz, CA (US);
Franz Xaver Zach, Los Gatos, CA (US);
Assignee:
Cadence Design Systems, Inc., San Jose, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
Abstract
A test mask with both verification structures and calibration structures is provided to enable the formation of an image of at least one verification structure and at least one calibration structure at a plurality of different test site locations under different dose and defocus conditions to allow the calibration structures to be measured and to obtain at least one computational model for optical proximity correction purposes.