The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2009
Filed:
Mar. 23, 2005
Erik Petrus Buurman, Veldhoven, NL;
Thomas Josephus Maria Castenmiller, Eindhoven, NL;
Johannes Wilhelmus Maria Cornelis Teeuwsen, Helmond, NL;
Bearrach Moest, Eindhoven, NL;
Mare Antonius Maria Haast, Eindhoven, NL;
Erik Petrus Buurman, Veldhoven, NL;
Thomas Josephus Maria Castenmiller, Eindhoven, NL;
Johannes Wilhelmus Maria Cornelis Teeuwsen, Helmond, NL;
Bearrach Moest, Eindhoven, NL;
Mare Antonius Maria Haast, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method and apparatus make use of data representing changes in wavelength of a radiation source to provide control of focal plane position or to provide correction of sensor data. In the first aspect, the wavelength variation data is provided to control systems that control focus by moving apparatus components including, for example, the mask table, the substrate table or optical elements of the projection optical system. In the second aspect, variation data is used in correcting, e.g., focal plane position data measured by a transmitted image sensor. The two aspects may be combined in a single apparatus or may be used separately.