The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2009
Filed:
May. 14, 2007
Yiping Feng, Cupertino, CA (US);
Jianou Shi, Milpitas, CA (US);
Xiafang Zhang, San Jose, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
A method for determining an effective capacitance of a dielectric material, by forming first and second asymmetrical electrodes entirely within a field of the dielectric material, where the first electrode, the second electrode, and the field of the dielectric material are co-planar, neither the first electrode nor the second electrode are either electrically connected to ground or to each other, applying a first charge Q on the first electrode, measuring a first voltage change Von the first electrode, measuring a second voltage change Von the second electrode, depositing a second charge Q' on the second electrode, measuring a third voltage change Von the first electrode, measuring a fourth voltage change Von the second electrode, calculating a first ground capacitance Cby C=(VQ′−VQ)/(VV−VV), calculating a second ground capacitance Cg2 by C=(VQ−VQ′)/(VV−VV), and calculating an inter-electrode capacitance Cby C=VC/(V−V)=VC/(V−V).