The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2009
Filed:
Oct. 19, 2005
Norihisa Koga, Kikuchi-gun, JP;
Shinji Koga, Kikuchi-gun, JP;
Naoto Yoshitaka, Kikuchi-gun, JP;
Akira Nishiya, Kikuchi-gun, JP;
Norihisa Koga, Kikuchi-gun, JP;
Shinji Koga, Kikuchi-gun, JP;
Naoto Yoshitaka, Kikuchi-gun, JP;
Akira Nishiya, Kikuchi-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A laser processing apparatus comprises a laser source, a substrate-holding unit, a liquid-supplying unit, a support which has a plurality of mask patterns including a specific mask pattern for imparting a cross-sectional shape to the laser beam, and a support-driving mechanism which moves the support. The liquid-supplying unit supplies the liquid to the substrate, forming a liquid film thereon. The support-driving mechanism moves the support, aligning the specific mask pattern with an axis of the laser beam. The laser beam emitted from the laser unit passes through the specific mask pattern, acquiring a specific cross-sectional shape, and is applied to the substrate through the liquid film, illuminating.