The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2009
Filed:
Jul. 01, 2005
Shifang LI, Pleasanton, CA (US);
Vi Vuong, Fremont, CA (US);
Alan Nolet, San Jose, CA (US);
Junwei Bao, Fremont, CA (US);
Shifang Li, Pleasanton, CA (US);
Vi Vuong, Fremont, CA (US);
Alan Nolet, San Jose, CA (US);
Junwei Bao, Fremont, CA (US);
Timbre Technologies, Inc., Santa Clara, CA (US);
Abstract
The profile of a structure having a region with a spatially varying property is modeled using an optical metrology model. A set of profile parameters is defined for the optical metrology model to characterize the profile of the structure. A set of layers is defined for a portion the optical metrology model that corresponds to the region of the structure with the spatially varying property, each layer having a defined height and width. For each layer, a mathematic function that varies across at least a portion of the width of the layer is defined to characterize the spatially varying property within a corresponding layer in the region of the structure.