The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2009
Filed:
Nov. 01, 2006
Hyun Seung Shin, Incheon, KR;
Young Doo Kim, Seoul, KR;
Yong Seok Kim, Seoul, KR;
Sang-il Park, Seongnam, KR;
Hyun Seung Shin, Incheon, KR;
Young Doo Kim, Seoul, KR;
Yong Seok Kim, Seoul, KR;
Sang-il Park, Seongnam, KR;
Park Systems Corp., Suwon, KR;
Abstract
Provided are a scanning probe microscope (SPM) that prevents a distortion of an image caused by alignment errors of scanners and a method of measuring a sample using the same. The scanning probe microscope comprises a probe; a first scanner changing a position of the probe along a straight line; a second scanner changing a position of a sample in a plane; and an adjusting device adjusting a position of the second scanner or the first scanner so that the straight line where the position of the probe is changed using the first scanner is perpendicular to the plane in which the position of the sample is changed using the second scanner.