Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device

Abstract

To provide a generator capable of generating plasma and ozone with high efficiency and easy to handle, with a simple structure. An electrode partis formed of electrodesandwithout dielectric material interposed therebetween. An arc-extinguishing capacitoras a charge storage part for storing charge is connected in series to the electrode part. An AC power sourcegenerating plasma by causing self-arc-extinguishing discharge between the electrodesandby applying AC voltage to charge and discharge the arc-extinguishing capacitor, is connected to both ends of a circuit in which the electrode partand the arc-extinguishing capacitorare connected in series. The arc-extinguishing capacitorand one electrodeof the electrode partconnected thereto are unitized, for making the electrode part multi-polarized. A unit is constituted of a floating electrode serving as both of the one electrodeof the electrode partand one electrode of the arc-extinguishing capacitor, an insulating material provided around the floating electrode and a grounding electrode provided around the insulating material.