The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2009

Filed:

Apr. 11, 2007
Applicants:

Jong-cheol Lee, Seoul, KR;

Kyoung-ryul Yoon, Goyang-si, KR;

Ki-vin Im, Suwon-si, KR;

Jae-hyun Yeo, Bucheon-si, KR;

Eun-ae Chung, Suwon-si, KR;

Jin-il Lee, Seongnam-si, KR;

Inventors:

Jong-Cheol Lee, Seoul, KR;

Kyoung-Ryul Yoon, Goyang-si, KR;

Ki-Vin Im, Suwon-si, KR;

Jae-Hyun Yeo, Bucheon-si, KR;

Eun-Ae Chung, Suwon-si, KR;

Jin-Il Lee, Seongnam-si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/8242 (2006.01); H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract

A multilayer electrode structure has a conductive layer including aluminum, an oxide layer formed on the conductive layer, and an oxygen diffusion barrier layer. The oxide layer includes zirconium oxide and/or titanium oxide. The oxygen diffusion barrier layer is formed at an interface between the conductive layer and the oxide layer by re-oxidizing the oxide layer. The oxygen diffusion barrier layer includes aluminum oxide.


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