The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2009
Filed:
Apr. 10, 2006
Ce MA, Cary, NC (US);
Qing Min Wang, Edison, NJ (US);
Patrick J. Helly, Valley Center, CA (US);
Richard Hogle, Oceanside, CA (US);
Ce Ma, Cary, NC (US);
Qing Min Wang, Edison, NJ (US);
Patrick J. Helly, Valley Center, CA (US);
Richard Hogle, Oceanside, CA (US);
Linde, Inc., Murray Hill, NJ (US);
Abstract
A unique combination of solution stabilization and delivery technologies with special ALD operation is provided. A wide range of low volatility solid ALD precursors dissolved in solvents are used. Unstable solutes may be stabilized in solution and all of the solutions may be delivered at room temperature. After the solutions are vaporized, the vapor phase precursors and solvents are pulsed into a deposition chamber to assure true ALD film growth.