The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2009
Filed:
May. 12, 2006
Applicants:
Masanobu Igeta, Albany, NY (US);
Kazuyoshi Yamazaki, Nirasaki, JP;
Shintaro Aoyama, Nirasaki, JP;
Hiroshi Shinriki, Matsudo, JP;
Inventors:
Masanobu Igeta, Albany, NY (US);
Kazuyoshi Yamazaki, Nirasaki, JP;
Shintaro Aoyama, Nirasaki, JP;
Hiroshi Shinriki, Matsudo, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01); C03C 15/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method to solve such a problem that plasma will not ignite in restarting operation of a processing container that has not been operated with the inside kept drawn to vacuum. Gas containing oxygen is passed in a processing container, and ultraviolet light is irradiated to the gas while gas inside the processing containeris being discharged. After that, a remote plasma sourceis driven to ignite plasma.