The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2009
Filed:
Jul. 17, 2006
Takanori Saito, Minato-Ku, JP;
Toshiyuki Makiya, Tachikawa, JP;
Hisaei Osanai, Minato-Ku, JP;
Tsuyoshi Takizawa, Minato-Ku, JP;
Tomohisa Shimazu, Minato-Ku, JP;
Kazuhide Hasebe, Minato-Ku, JP;
Hiroyuki Yamamoto, Minato-Ku, JP;
Yukimasa Saito, Minato-Ku, JP;
Kenichi Yamaga, Minato-Ku, JP;
Takanori Saito, Minato-Ku, JP;
Toshiyuki Makiya, Tachikawa, JP;
Hisaei Osanai, Minato-Ku, JP;
Tsuyoshi Takizawa, Minato-Ku, JP;
Tomohisa Shimazu, Minato-Ku, JP;
Kazuhide Hasebe, Minato-Ku, JP;
Hiroyuki Yamamoto, Minato-Ku, JP;
Yukimasa Saito, Minato-Ku, JP;
Kenichi Yamaga, Minato-Ku, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a heating unit provided on an inside wall of the heating-furnace body; a reaction container consisting of a single tube contained in the heating-furnace body; a gas-discharging-pipe connecting portion formed at an upper portion of the reaction container; and a first temperature controlling unit provided around the gas-discharging-pipe connecting portion.