The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2009
Filed:
Sep. 27, 2004
Masatoshi Yasutake, Chiba, JP;
Takashi Kaito, Chiba, JP;
Yoshiharu Shirakawabe, Chiba, JP;
Itaru Kitajima, Chiba, JP;
Masatoshi Yasutake, Chiba, JP;
Takashi Kaito, Chiba, JP;
Yoshiharu Shirakawabe, Chiba, JP;
Itaru Kitajima, Chiba, JP;
SII NanoTechnology Inc., , JP;
Abstract
In a method for fabricating a nanometer-scale structure by arranging nanotubes in a predetermined direction at a predetermined position, the method for fabricating a nanometer-scale structure comprises a first step of planarizing a substrate by etching a predetermined part by irradiating a focused energy beam to the sample, a second step of decomposing and depositing an organic gas into a columnar structure with an objective of determining the position and direction, and a third step of attaching and fixing the nanotube by using the thus deposited columnar structure as a standard of position and direction.