The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2009
Filed:
Apr. 20, 2007
Srinivas Doddi, Fremont, CA (US);
Lawrence Lane, San Jose, CA (US);
Vi Vuong, Fremont, CA (US);
Michael Laughery, Austin, TX (US);
Junwei Bao, Palo Alto, CA (US);
Kelly Barry, Saratoga, CA (US);
Nickhil Jakatdar, Los Altos, CA (US);
Emmanuel Drege, San Jose, CA (US);
Srinivas Doddi, Fremont, CA (US);
Lawrence Lane, San Jose, CA (US);
Vi Vuong, Fremont, CA (US);
Michael Laughery, Austin, TX (US);
Junwei Bao, Palo Alto, CA (US);
Kelly Barry, Saratoga, CA (US);
Nickhil Jakatdar, Los Altos, CA (US);
Emmanuel Drege, San Jose, CA (US);
Timbre Technologies, Inc., Santa Clara, CA (US);
Abstract
Specific wavelengths to use in optical metrology of an integrated circuit can be selected using one or more selection criteria and termination criteria. Wavelengths are selected using the selection criteria, and the selection of wavelengths is iterated until the termination criteria are met.