The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2009
Filed:
Aug. 30, 2005
Norihisa Koga, Koshi-Machi, JP;
Shinji Koga, Koshi-Machi, JP;
Naoto Yoshitaka, Koshi-Machi, JP;
Akira Nishiya, Koshi-Machi, JP;
Norihisa Koga, Koshi-Machi, JP;
Shinji Koga, Koshi-Machi, JP;
Naoto Yoshitaka, Koshi-Machi, JP;
Akira Nishiya, Koshi-Machi, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A drain port and an exhaust port arranged at the bottom of a cup surrounding a substrate holding unit. A drainage tray is arranged below the cup so as to cover the moving area of the drain port when the substrate holding unit and the cup move in X-directions and Y-directions. An exhaust unit is arranged at a position corresponding to the position of the exhaust port of the cup when the substrate holding unit is in its spin-drying position. The exhaust unit is connected to the exhaust port to suck the interior of the cup when the spin-drying of the substrate is executed. The use of a flexible tube which is always connected to the exhaust port is no longer necessary.