The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2008
Filed:
Mar. 31, 2005
Herve A. Besaucele, San Diego, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Fedor B. Trintchouk, San Diego, CA (US);
Hao Ton That, San Diego, CA (US);
Herve A. Besaucele, San Diego, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Fedor B. Trintchouk, San Diego, CA (US);
Hao Ton That, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A line narrowed gas discharge laser system and method of operation are disclosed which may comprise: an oscillator cavity; a laser chamber comprising a chamber housing containing a lasing medium gas; at least one peaking capacitor electrically connected to the chamber housing and to a first one of a pair of electrodes; a second one of the pair of electrodes connected to an opposite terminal of the at least one peaking capacitor; a current return path connected to the chamber housing; the one terminal, the first one of the electrodes, the lasing medium gas, the second one of the electrodes, the current return path and the second terminal forming a head current inductive loop having an inductance unique to the particular head current inductive loop; a spectral quality tuning mechanism comprising a mechanism for changing the particular head current inductive loop inductance value for the particular head current inductance loop.