The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 02, 2008

Filed:

Nov. 15, 2005
Applicants:

Sven Antoin Johan Hol, Yokohama, JP;

Angelo Cesar Peter DE Klerk, Etten-Leur, NL;

Erik Roelof Loopstra, Heeze, NL;

Fransicus Mathijs Jacobs, Asten, NL;

Mark Scholten, Buchten, NL;

Arjan Franklin Bakker, Helenaveen, NL;

Inventors:

Sven Antoin Johan Hol, Yokohama, JP;

Angelo Cesar Peter De Klerk, Etten-Leur, NL;

Erik Roelof Loopstra, Heeze, NL;

Fransicus Mathijs Jacobs, Asten, NL;

Mark Scholten, Buchten, NL;

Arjan Franklin Bakker, Helenaveen, NL;

Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02K 41/00 (2006.01); H02K 3/00 (2006.01); G03B 27/42 (2006.01);
U.S. Cl.
CPC ...
Abstract

A motor includes a magnet assembly to generate a magnetic field. The field includes along the first direction parts which are alternately orientated in the first and the second direction. The parts extend in a third direction which is perpendicular to the first and the second direction. The motor further includes a first coil winding to carry a first current. The first coil winding to extend in the first direction between parts of the magnetic field orientated in the second direction, to generate the force in the first direction. The motor also includes a second coil winding to carry a second current. The second coil winding to extend in the first direction between parts of the magnetic field substantially orientated in the first direction, to generate the force in the second direction.


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