The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2008
Filed:
Nov. 08, 2005
Joseph C. Olson, Beverly, MA (US);
Anthony Renau, West Newbury, MA (US);
Donna L. Smatlak, Belmont, MA (US);
Kurt Deckerlucke, Essex, MA (US);
Paul Murphy, Reading, MA (US);
Alexander S. Perel, Danvers, MA (US);
Russell J. Low, Rowley, MA (US);
Peter Kurunczi, Somerville, MA (US);
Joseph C. Olson, Beverly, MA (US);
Anthony Renau, West Newbury, MA (US);
Donna L. Smatlak, Belmont, MA (US);
Kurt Deckerlucke, Essex, MA (US);
Paul Murphy, Reading, MA (US);
Alexander S. Perel, Danvers, MA (US);
Russell J. Low, Rowley, MA (US);
Peter Kurunczi, Somerville, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
Ion sources and methods for generating molecular ions in a cold operating mode and for generating atomic ions in a hot operating mode are provided. In some embodiments, first and second electron sources are located at opposite ends of an arc chamber. The first electron source is energized in the cold operating mode, and the second electron source is energized in the hot operating mode. In other embodiments, electrons are directed through a hole in a cathode in the cold operating mode and are directed at the cathode in the hot operating mode. In further embodiments, an ion beam generator includes a molecular ion source, an atomic ion source and a switching element to select the output of one of the ion sources.