The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2008
Filed:
Jun. 08, 2005
Marcel Koenraad Marie Baggen, Nuenen, NL;
Dirk-jan Bijvoet, Eindhoven, NL;
Sjoerd Nicolaas Lambertus Donders, s-Hertogenbosch, NL;
Jan Frederik Hoogkamp, Breda, NL;
Albert Johannes Maria Jansen, Eindhoven, NL;
Jan-jaap Kuit, Veldhoven, NL;
Peter Schaap, Eindhoven, NL;
Joep Janssen, Son, NL;
Hubrecht Bastiaan Jasperse, Middelbeers, NL;
Arjan Martin Van Der Wel, Eindhoven, NL;
Marcel Koenraad Marie Baggen, Nuenen, NL;
Dirk-Jan Bijvoet, Eindhoven, NL;
Sjoerd Nicolaas Lambertus Donders, s-Hertogenbosch, NL;
Jan Frederik Hoogkamp, Breda, NL;
Albert Johannes Maria Jansen, Eindhoven, NL;
Jan-Jaap Kuit, Veldhoven, NL;
Peter Schaap, Eindhoven, NL;
Joep Janssen, Son, NL;
Hubrecht Bastiaan Jasperse, Middelbeers, NL;
Arjan Martin Van Der Wel, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A stage apparatus for displacing an object having a substantially flat surface is described. The apparatus includes an object table for supporting the object and a positioning device for displacing the object table in a first direction. The apparatus further includes a clamping device for clamping the object to the object table by a first clamping force, the first clamping force being controlled by an electronic control unit based upon a state of the object.